Abstract: We present a grid-type MEMS capacitive pressure sensor fabricated using a 0.18 μm 1P6M CMOS processes combined with a surface micromachining technique. The innovative grid-type sensor design ...
Norwood, MA. Xcerra announced today that SITRI, the Shanghai Industrial µTechnology Research Institute, has added barometric-pressure-sensor test and calibration to its test-services offering. SITRI ...
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