Just as circuit metallization must evolve to manage resistance as features shrink, so must the dielectric half of the interconnect stack. For quite some time, manufacturers have needed a dielectric ...
One evening quite a few years ago, as I was driving through my hometown I saw the telltale flashing lights of the local volunteer fire department ahead. I passed by a side road where all the activity ...
High-κ dielectrics have been actively pursued to replace SiO 2 as gate insulators for silicon devices 1. The relatively low κ of SiO 2 (at 3.9) limits its use in transistors as gate lengths scale down ...
Polymer-based dielectrics are widely used in different electrical and electronic devices like capacitors, power transmission cables, and microchips. To adapt to different working conditions, a range ...
The invention of the transistor was a significant breakthrough that altered the course of history for the electronics and computer industries. They are an inseparable part of any electronic device ...
While one group of companies is hard at work developing new high-k dielectrics, another group is working to come up with semiconductor etching and cleaning chemistries that complement these exotic new ...
Silicon Austria Labs (SAL) has received its Centura PECVD tool from Applied Materials, supporting dielectrics deposition for RF circulators on 200mm wafers. The tool is in commissioning phase and ...