Abstract: We present a grid-type MEMS capacitive pressure sensor fabricated using a 0.18 μm 1P6M CMOS processes combined with a surface micromachining technique. The innovative grid-type sensor design ...
Abstract: This letter presents the design methodology and heterogeneous fabrication process of a novel dual-mode microelectromechanical systems gas pressure sensor that vertically integrates ...
Renesas Electronics Corporation has introduced the RA0L1 microcontroller (MCU) Group, built on the Arm Cortex-M23 processor, to expand its RA0 Series portfolio. The new devices are designed for ...
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