TRINAMIC Motion Control GmbH & Co. KG introduces the smallest and lowest-power single-axis servo controller/driver module with integrated motion control. The new TMCM-1321 servo controller/driver ...

TRINAMIC Motion Control, now part of Maxim Integrated Products, Inc. has introduced the small and low-power single-axis servo controller/driver module with integrated motion control. TRINAMIC Motion ...

Abstract: A programmable multizone thermal-processing module is developed to achieve wafer-temperature uniformity during the thermal-cycling process in lithography. The bake and chill steps are ...

Domestic researchers have developed a module that can be combined with existing factory production equipment to implement artificial intelligence (AI). When the module is attached, it can autonomously ...