Abstract: We present a grid-type MEMS capacitive pressure sensor fabricated using a 0.18 μm 1P6M CMOS processes combined with a surface micromachining technique. The innovative grid-type sensor design ...
Abstract: This study proposes an innovative approach for fabricating a multiparameter sensor based on fiber Bragg gratings (FBGs) using 3-D printing technology. In this sensor design, three FBGs were ...
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